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Pure Appl. Chem. Vol. 74, No. 9, pp. 1519-1526 (2002)

Pure and Applied Chemistry

Vol. 74, Issue 9

Structural variations in nanocrystalline nickel films*

Pratibha L. Gai1,2,**, Rahul Mitra3,4, and Julia R. Weertman3

1DuPont, Central Research, Experimental Station, Wilmington, DE 19880-0356, USA; 2University of Delaware, Department of Materials Science and Engineering, Newark, DE 19716, USA; 3Northwestern University, Department of Materials Science, Evanston, IL 60208, USA; 4Defence Metallurgical Research Laboratory, Hyderabad, India

Abstract: Nanocrystalline nickel films of technological importance have been grown on various liquid nitrogen-cooled substrates by magnetron sputtering with and without a substrate bias. The atomic structural and chemical studies have unveiled variations in inter- and intragranular structures under the different process conditions. The origin and the development of the crystallization process with and without the substrate bias voltage have been inferred from the results.

* Special Topic Issue on the Theme of Nanostructured Advanced Materials
**Corresponding author


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