Diagnostics and insights on PECVD for gas-barrier coatings*
Mariadriana Creatore, Fabio Palumbo, and Riccardo d'Agostino
Università degli Studi, Dipartimento di Chimica,
CNR, Centro di Studi per la Chimica dei Plasmi (now Istituto di Metodologie
Inorganische e Plasmi), via Orabona 4, 70124 Bari, Italy
Abstract: In this work, we report on our last results concerning
the polyethyleneterephtalate barrier performance optimization as a function
of the chemistry of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed
plasmas ignited in an RF capacitively coupled parallel plates reactor.
The influence of the gas feed composition and power on the plasma phase/coating
chemistry and on the O2 gas transmission rate has been investigated.
The plasma phase has been studied by means of Fourier transform infrared
absorption (FT-IR) and optical emission spectroscopies (OES), and the
results have been coupled to the film chemistry investigated by means
of FT-IR spectroscopy. These techniques show excellent potentialities
in the correlation of the plasma phase and film chemistries with the
barrier properties of the SiOx-coated polymer, especially when a very
good barrier level is required.
* Lecture presented at the 15th International Symposium
on Plasma Chemistry, Orléans, France, 9-13 July 2001. Other presentations
are presented in this issue, pp. 317492.
** Corresponding author.
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